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Hybrid reactive HiPIMS deposition system for the deposition of functional metal oxide thin films
Hubička, Zdeněk ; Čada, Martin ; Olejníček, Jiří ; Kšírová, Petra ; Tvarog, Drahoslav
The report describes a hybrid reactive HiPIMS deposition system for the deposition of functional metal oxide thin films with defined optical properties.

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