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SMV-2017-22: Development of a multiaxis interferometric system of coordinate measurement
 Holá, Miroslava ; Lazar, Josef ; Hucl, Václav ; Čížek, Martin
The aim of the project of the contractual research was development of a multiaxis interferometric system for coordinate measurement. This system make possible to contactless measurement of displacement in axis x, y with compensation refractive index of air. The emphasis was placed on with high accuracy and repeatability measurement on nanometre level for wavelength 633 nm. Part of the contractual research was development and realization driving system for detection of signals. We used homodyne detection system. The measurement system was tested in laboratory and then was installed in the aim system.
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