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National Repository of Grey Literature

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	Height profile measurement by means of white-light interferometry Pavlíček, Pavel White-light interferometer measures the heigh profile of smooth as well of rough surfaces, this feature renders it suitable for the technical practice. Detailed record
	Height profile measurement by means of white-light interferometry Pavlíček, Pavel White-light interferometry is an established method for the height-profile measurement of rough surface. we show the results of the heigh-profile measurement of silicon waters. Detailed record

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