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The pressure measuring using LTCC technology
Straka, Michal ; Řezníček, Michal (referee) ; Kosina, Petr (advisor)
This thesis deals with the problems of the pressure sensor made on a low temperature co-fired ceramics. The pressure sensor converts the measured physical quantity to the electrical signal. The strain-gauge, capacitive and optical sensors are used for scanning of the pressure. It is possible to construct the multilayer sensors with holes and cutouts, through the use of the 3D structure on LTCC sensors. The passive parts can be applied on this layer through the thin-layer or thick-layer technology, which creates conductible paths and contacts for parts and outlets. In the practical part of the work, a few construction types of pressure sensors are designed, implemented and measured. Emphasis is given to strain-gauge strip sensor and possible problems during its manufacture, lamination and deformation of burn-out.
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Capacitive sensor in low temperature co-fired Ceramic
Symerský, Tomáš ; Řezníček, Michal (referee) ; Kosina, Petr (advisor)
This bachelor thesis deals with theoretical knowledge of basic materials especially of a low-temperature ceramics, which enables creating multi-layer structures. Different defects occur by forming these structures, especially in the area of cavernas and micro-tubules. This thesis uses different methods which lead to an elimination of these defects. The thesis also deals with techniques which can be used to a realization of these sensors. Achieved knowledge helped to draft and realize the capacity sensor of flow and pressure in a low-temperature ceramics. The pressure sensor was tested by the load in the frequency spectrum, while the flow sensor was tested for different substances.
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The pressure measuring using LTCC technology
Straka, Michal ; Řezníček, Michal (referee) ; Kosina, Petr (advisor)
This thesis deals with the problems of the pressure sensor made on a low temperature co-fired ceramics. The pressure sensor converts the measured physical quantity to the electrical signal. The strain-gauge, capacitive and optical sensors are used for scanning of the pressure. It is possible to construct the multilayer sensors with holes and cutouts, through the use of the 3D structure on LTCC sensors. The passive parts can be applied on this layer through the thin-layer or thick-layer technology, which creates conductible paths and contacts for parts and outlets. In the practical part of the work, a few construction types of pressure sensors are designed, implemented and measured. Emphasis is given to strain-gauge strip sensor and possible problems during its manufacture, lamination and deformation of burn-out.
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|
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Capacitive sensor in low temperature co-fired Ceramic
Symerský, Tomáš ; Řezníček, Michal (referee) ; Kosina, Petr (advisor)
This bachelor thesis deals with theoretical knowledge of basic materials especially of a low-temperature ceramics, which enables creating multi-layer structures. Different defects occur by forming these structures, especially in the area of cavernas and micro-tubules. This thesis uses different methods which lead to an elimination of these defects. The thesis also deals with techniques which can be used to a realization of these sensors. Achieved knowledge helped to draft and realize the capacity sensor of flow and pressure in a low-temperature ceramics. The pressure sensor was tested by the load in the frequency spectrum, while the flow sensor was tested for different substances.
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