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National Repository of Grey Literature 1 records found  Search took 0.01 seconds. 
Surface roughness and resistivity of thin films
 Franc, J. ; Novotný, Jan
Surface finish of alumina thin film substrates was measured with stylus profilometer. A connection between the obtained values of Ra and the thin film resistance was studied. No correlation can be found owing to big stylus radius and computation method used in profilometer.
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