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National Repository of Grey Literature

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Growth of 3D Structures Induced by Electron Beam on Ceramic Substrates Bukvišová, Kristýna ; Čechal, Jan (referee) ; Salamon, David (advisor) Vystaví-li se vzorek působení elektronového svazku, dojde na jeho povrchu ke strukturním změnám. Jednou z těchto změn je vertikální růst 3D struktur na keramických materiálech. V práci jsou zkoumány podmínky nutné pro takový proces. Nárůst teploty často zapříčiní povrchové změny, proto je v práci proveden výpočet ohřevu materiálu elektronovým svazkem. Dále je zkoumán vliv různých parametrů svazku na růst 3D struktur, závislost objemu a rozměrů je analyzována pomocí AFM. Výsledný odhad nárůstu teploty se pohybuje v řádech jednotek, maximálně desítek K. Výrazný objemový růst je pozorován pro nízká urychlovací napětí a malé proudy. Výška vzniklých struktur dosahuje 100 nm za minutu a je nepřímo úměrná velikosti proudu. Detailed record

Growth of 3D Structures Induced by Electron Beam on Ceramic Substrates Bukvišová, Kristýna ; Čechal, Jan (referee) ; Salamon, David (advisor) Vystaví-li se vzorek působení elektronového svazku, dojde na jeho povrchu ke strukturním změnám. Jednou z těchto změn je vertikální růst 3D struktur na keramických materiálech. V práci jsou zkoumány podmínky nutné pro takový proces. Nárůst teploty často zapříčiní povrchové změny, proto je v práci proveden výpočet ohřevu materiálu elektronovým svazkem. Dále je zkoumán vliv různých parametrů svazku na růst 3D struktur, závislost objemu a rozměrů je analyzována pomocí AFM. Výsledný odhad nárůstu teploty se pohybuje v řádech jednotek, maximálně desítek K. Výrazný objemový růst je pozorován pro nízká urychlovací napětí a malé proudy. Výška vzniklých struktur dosahuje 100 nm za minutu a je nepřímo úměrná velikosti proudu. Detailed record

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