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Creating themes thin-film methods
Ondráček, Michal ; Šimonová, Lucie (referee) ; Šubarda, Jiří (advisor)
The master’s thesis deals with the theory of thin film technology, especially creating these layers. The work includes the distribution of vacuum deposition techniques for physical (PVD) and chemical (CVD). The main aim is to create a theme in different ways of implementation by using magnetron sputtering device, and these motives evaluated in terms of the quality of sputtering.
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Capacitive sensor in low temperature co-fired Ceramic
Symerský, Tomáš ; Řezníček, Michal (referee) ; Kosina, Petr (advisor)
This bachelor thesis deals with theoretical knowledge of basic materials especially of a low-temperature ceramics, which enables creating multi-layer structures. Different defects occur by forming these structures, especially in the area of cavernas and micro-tubules. This thesis uses different methods which lead to an elimination of these defects. The thesis also deals with techniques which can be used to a realization of these sensors. Achieved knowledge helped to draft and realize the capacity sensor of flow and pressure in a low-temperature ceramics. The pressure sensor was tested by the load in the frequency spectrum, while the flow sensor was tested for different substances.
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Capacitive sensor in low temperature co-fired Ceramic
Symerský, Tomáš ; Řezníček, Michal (referee) ; Kosina, Petr (advisor)
This bachelor thesis deals with theoretical knowledge of basic materials especially of a low-temperature ceramics, which enables creating multi-layer structures. Different defects occur by forming these structures, especially in the area of cavernas and micro-tubules. This thesis uses different methods which lead to an elimination of these defects. The thesis also deals with techniques which can be used to a realization of these sensors. Achieved knowledge helped to draft and realize the capacity sensor of flow and pressure in a low-temperature ceramics. The pressure sensor was tested by the load in the frequency spectrum, while the flow sensor was tested for different substances.
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|
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Creating themes thin-film methods
Ondráček, Michal ; Šimonová, Lucie (referee) ; Šubarda, Jiří (advisor)
The master’s thesis deals with the theory of thin film technology, especially creating these layers. The work includes the distribution of vacuum deposition techniques for physical (PVD) and chemical (CVD). The main aim is to create a theme in different ways of implementation by using magnetron sputtering device, and these motives evaluated in terms of the quality of sputtering.
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