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National Repository of Grey Literature 1 records found  Search took 0.00 seconds. 
Silicon monocrystal wafers ground with various abrasive materials
 Havelková, Martina ; Hiklová, Helena
The paper describes measuring of silicon wafers surface. Row of samples were made for different purposes in Themis (Rožnov pod Radhoštěm). The measuring were done with Form Talysurf Series 2 apparatus and the dependence on different conditions of cutting and grinding were monitored.
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