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National Repository of Grey Literature 1 records found  Search took 0.01 seconds. 
Quantitative study of density of the dopant configuration in a semiconductor by emission of secondary electrons
 Mika, Filip
The topic of the work is study of one technological layer of semiconductor structure with delimited doped areas by scanning microscope with slow electrons in both ultra-high vacuum and standard vacuum conditions. The aim is to find optimum conditions of imaging of doped areas and to obtain dependence values between the contrast and density of the addition.
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