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National Repository of Grey Literature

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Optoelectronic pressure sensor with Si.sub.3./sub.N.sub.4./sub. diaphragm Beneš, P. ; Matějka, František ; Vrba, R. ; Kolařík, V. Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into the deformation of a thick layer nitride membrane. Nitride membrane creates a mirror for laser beam and moves with reflected laser mark. Its position is sensed via a position sensing device - photo lateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip provides an IEEE 1451.2 interface. Detailed record

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