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Nanostructured layers of semiconducting metal oxides in gas sensors
Bartoš, Dušan ; Pytlíček, Zdeněk (referee) ; Bendová, Mária (advisor)
This diploma thesis discusses the gas sensor preparation via anodic oxidation. It names sensor types, deals with the sensing principle of electrochemical sensors in detail and submits sensor parameters. It describes preparation technology and characterization technology methods. In the experimental part, it focuses on both the measurement methodology and the electrochemical oxygen sensor covered with titanium dioxide nanocolumns fabrication. Not the least it discusses acquired research results.
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Optimization of the radiofrequency atomic source for deposition of GaN
Kern, Michal ; Wertheimer, Pavel (referee) ; Mach, Jindřich (advisor)
This thesis is focused on construction and optimization of radiofrequency atomic dissociation source of atomic nitrogen for depostion of GaN. The theoretical part deals with atomic sources, growth of ultrathin layers and the issue of radiofrequency circuits, with emphasis on their design using Smith chart. Methods for synthesis of GaN ultrathin layers and deposition are also discussed. In the experimental part, design and realization of various congurations of the impedance matching network is described. Using the impedance matching network a nitrogen plasma discharge was successfuly created and its spectrum was analysed. Afterwards, design and realization of a stepper motor control for the impedance matching network is described.
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Nanostructured layers of semiconducting metal oxides in gas sensors
Bartoš, Dušan ; Pytlíček, Zdeněk (referee) ; Bendová, Mária (advisor)
This diploma thesis discusses the gas sensor preparation via anodic oxidation. It names sensor types, deals with the sensing principle of electrochemical sensors in detail and submits sensor parameters. It describes preparation technology and characterization technology methods. In the experimental part, it focuses on both the measurement methodology and the electrochemical oxygen sensor covered with titanium dioxide nanocolumns fabrication. Not the least it discusses acquired research results.
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Nanostructured layers of semiconducting metal oxides in gas sensors
Bartoš, Dušan ; Pytlíček, Zdeněk (referee) ; Bendová, Mária (advisor)
This diploma thesis discusses the gas sensor preparation via anodic oxidation. It names sensor types, deals with the sensing principle of electrochemical sensors in detail and submits sensor parameters. It describes preparation technology and characterization technology methods. In the experimental part, it focuses on both the measurement methodology and the electrochemical oxygen sensor covered with titanium dioxide nanocolumns fabrication. Not the least it discusses acquired research results.
|
|
|
Optimization of the radiofrequency atomic source for deposition of GaN
Kern, Michal ; Wertheimer, Pavel (referee) ; Mach, Jindřich (advisor)
This thesis is focused on construction and optimization of radiofrequency atomic dissociation source of atomic nitrogen for depostion of GaN. The theoretical part deals with atomic sources, growth of ultrathin layers and the issue of radiofrequency circuits, with emphasis on their design using Smith chart. Methods for synthesis of GaN ultrathin layers and deposition are also discussed. In the experimental part, design and realization of various congurations of the impedance matching network is described. Using the impedance matching network a nitrogen plasma discharge was successfuly created and its spectrum was analysed. Afterwards, design and realization of a stepper motor control for the impedance matching network is described.
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