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Advanced techniques of micromachining
Šalomoun, Vojtěch ; Prášek, Jan (referee) ; Pekárek, Jan (advisor)
Fabrication of micro-electro-mechanical systems (MEMS) requires advanced level of miniaturization, which is not achievable by technology used in microeletronics. Socalled micromachining covers many unique techniques of material processing to get microstructures with possible dimensions below 1 m. This bachelor’s thesis gives a general introduce to micromachining of MEMS. Its focus is on bulk and surface micromachining by wet and dry etching. The practical part contains design of microstructures, their manufacturing process and creation of computer models in CoventorWare suite.
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CAD systems for MEMS design
Lazar, Jaroslav ; Paloušek, David (referee) ; Hartl, Martin (advisor)
This thesis deals with CAD design tools for MEMS. First part describes and defines MEMS and its basic components. This is followed by a description of methods used to manufacture MEMS. The last part deals with particular CAD design tools, their modules and functions. Mentioned systems are then compared, reviewed and appropriate usage for each of them is suggested. Then the importance and advantages of MEMS are disccussed.
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Advanced techniques of micromachining
Šalomoun, Vojtěch ; Prášek, Jan (referee) ; Pekárek, Jan (advisor)
Fabrication of micro-electro-mechanical systems (MEMS) requires advanced level of miniaturization, which is not achievable by technology used in microeletronics. Socalled micromachining covers many unique techniques of material processing to get microstructures with possible dimensions below 1 m. This bachelor’s thesis gives a general introduce to micromachining of MEMS. Its focus is on bulk and surface micromachining by wet and dry etching. The practical part contains design of microstructures, their manufacturing process and creation of computer models in CoventorWare suite.
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|
|
CAD systems for MEMS design
Lazar, Jaroslav ; Paloušek, David (referee) ; Hartl, Martin (advisor)
This thesis deals with CAD design tools for MEMS. First part describes and defines MEMS and its basic components. This is followed by a description of methods used to manufacture MEMS. The last part deals with particular CAD design tools, their modules and functions. Mentioned systems are then compared, reviewed and appropriate usage for each of them is suggested. Then the importance and advantages of MEMS are disccussed.
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