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Studium mechanických vlastností kovových vrstev na křemíkové podložce Dušek, J. ; Buršíková, V. ; Sobota, Jaroslav ; Buršík, Jiří ; Bláhová, O. ; Klapetek, P. ; Vladoiu, R. ; Navrátil, V. The mechanical properties of metallic thin films deposited on silicon by magnetron sputtering and Thermoionic vacuum arc were studied using two different type of indentation methods - the depth sensing indentation test (DSI) and the continuous stiffness measurement method (CSM). Detailed record

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