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National Repository of Grey Literature

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SMV-2021-02: Development and implementation of amplitude masks for adjustment of optomechanical systems Meluzín, Petr ; Chlumská, Jana ; Kolařík, Vladimír ; Kopal, Jaroslav An amplitude mask was developed, implemented and characterized according to the partner's documents. The notation of the motif in an electron beam device and related technological operations were used for the preparation. The parameters were verified by scanning the surface with a probe. Detailed record

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