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Diagnostic of semiconductor materials by EBIC method
 Kuznetsov, Vitalii ; Vaněk, Jiří (referee) ; Čudek, Pavel (advisor)
The bachelor's thesis deals with the diagnostics of semiconductor materials by the EBIC method (beam induced current measurement) using a scanning electron microscope (SEM). The thesis describes the principle of operation of the scanning electron microscope, explains the interaction of electrons with a solid substance and the EBIC method. The principle of electrical conductivity of semiconductors is also explained in the theoretical part. Using the EBIC method, the lifetime and diffusion length of minority carriers in semiconductors can be investigated, which is what the practical part of the work is focused on.
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