National Repository of Grey Literature 1 records found  Search took 0.00 seconds. 
Design and construction of control subunits for plasma apparatus
KOUDELA, Zdeněk
This bachelor thesis is aimed at development and realization of control subunit for plasma reactor. The reader is briefly introduced to the principle of physical vapor deposition and the principle of mass flow meters. The main part of the work is design and realization of the system for controlling Bronkhorst mass flow meters. The output of the work is the control device itself.

Interested in being notified about new results for this query?
Subscribe to the RSS feed.