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Plasma-Assisted Deposition of Functional Bioactive Nanostructured Films
SEZEMSKÝ, Petr
The Ph.D. thesis focuses on the interdisciplinary research of advanced materials for the development of biosensors with multiple domain interrogation capabilities for the detection of biomolecules and pathogens, namely, Lyme borreliosis spirochetes, Borrelia burgdorferi s.l. The strategy for biosensor fabrication is based on an optical fiber whose surface is coated by precisely tailored nanostructured thin films by means of low-temperature plasma. The thesis demonstrates that an indium tin oxide (ITO) thin film, deposited by magnetron sputtering onto the optical fiber surface, can serve as an effective transducer for electrochemical and optical measurements. The optical interrogation is based on the measurement of the refractive index utilizing lossy-mode resonance (LMR) phenomena, while the electrochemical interrogation is performed mostly by cyclic voltammetry. It is shown that the optimal design of the active surface on an optical fiber enables simultaneous (in time and in situ) optical and electrochemical interrogation of liquids and detection of biological complexes, including markers of Lyme borreliosis pathogens.
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Sondová diagnostika nízkoteplotního plazmatu při depozičním procesu
KOZLOVÁ, Miroslava
This master thesis deals with examination of the parameters of low temperature plasma which is used for the deposition of thin layer of ITO. The method which is used in this thesis is the probe diagnostics. This thesis is divided into two parts. The first is the theoretical part, in which the basic parameters of low temperature plasma, principles of the probe diagnostics, and theories for this method are explained. The second part is the practical part, which presents the results of the measurement depending on changes in conditions of deposition.
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Implementace vypařovacího systému pro depozice tenkých vrstev
CIFREUND, David
This thesis focuses on gas dispensing for PECVD proceses in low temperature plasma. Key to succesful depositions is an accurate and stable flow rate of precursor to reactor, where discharges are used for depositions of thin films. Liquid can be also an admixture of the precursor, but it has to be mixed with the carrier gas and finaly evaporated. For this purpose was chosen CEM evaporating system from Bronkhorst High-Tech B.V., which is composed of gas mass flow controller, liquid mass flow controller, evaporating device and control unit. Main goal of this thesis is to implement evaporating system to plasma chemical reactor, calibrate it and do measuring tests.
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