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The graphene structures suitable for field effect transistors
Kurfürstová, Markéta ; Bartošík, Miroslav (referee) ; Mach, Jindřich (advisor)
This bachelor’s thesis is focused on preparation of graphene structures suitable for field effect transistors. In the first section, graphene is characterized in terms of its properties and prepataion methods. The second part sums up semiconductor technology, focusing on transistors with graphene layer. Next, electron beam litography method is presented, which had been used for preparation of the structures. Finally, an experimental procedure of graphene structures manufacture is described.
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Preparation of graphene nanostructures for applications
Dubnická Midlíková, Jana ; Procházka, Pavel (referee) ; Lišková, Zuzana (advisor)
The thesis deals with preparation of graphene nanostructures and their applications in the measurement of electrical transport properties of graphene. Graphene layers are prepared by mechanical exfoliation in two ways, by using adhesive tape or elastomeric film. The contacts for measurement of graphene layers resistance are fabricated by electron beam litography on exfoliated graphene flakes. Measurements of graphene transport properties take place in two environments, in air and in vacuum. Mobility and concentration of charge carriers of prepared graphene nanostructure are determined from the measured values.
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Plasmonically active nanostructures for optical filtering
Idesová, Beáta ; Liška, Jiří (referee) ; Rovenská, Katarína (advisor)
This bachelor’s thesis deals with optical color filters composed of plasmonically active nanostructures and studies the parameters which influence the performance of such filters. Using electron beam litography and selective reactive ion etching, plasmonic hole-like filters were prepared in alumina film on fused silica substrate. The fabricated arrays of nanostructures, acting as optical filters, varied in shape and size of the nanostructures, distances among the nanostructures and their lateral arrangement within the arrays. The influence of these factors on transmission spectra of plasmonic filters was experimentally analysed using optical spectroscopy. A majority of the observed alternations of the measured transmission spectra was consistent with the research study which is, as well, part of this thesis. The highest color filtering selectivity was observed in arrays with divided square structure shape which also exhibited decent transmittance.
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Fabrication of micro- and nanostructures by different etching methods
Těšík, Jan ; Urbánek, Michal (referee) ; Šamořil, Tomáš (advisor)
The selective etching is currently very widely used method for the preparation of micro- and nanostructures. This thesis deals with the principles of the etching methods, their applications and also the possibilities of dry and wet etching at the Institute of Physical Engineering. The experimental part is devoted to the preparation of the etching masks to ensure etching selectivity and to the preparation of pre-defined micro- and nanostructures. Important parameters were determined from the results, e.g. Si etch rate, selectivity of the masks etc. Further, the suitability of the used methods and etching masks were compared.
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Arrays of plasmonic nanostructures made of phase-change materials
Kepič, Peter ; Kejík, Lukáš (referee) ; Ligmajer, Filip (advisor)
Kryštálovú štruktúru materiálov s fázovou premenou dokážeme meniť dodaním vonkajšej energie, čo má za následok zmenu ich elektrických alebo magnetických vlastností. Hoci sa tento efekt ovládania plazmonických rezonancií v nanofotonike využíva, dva materiály zvolené v tejto práci — oxid vanadičitý (VO2) a zliatina železa a ródia (FeRh) — neboli zatiaľ dostatočne preskúmané. Plazmonické rezonancie môžu byť charakterizované ako rezonancie electromagnetického poľa v kovovvých nanoštruktúrach. Týmito nanoštruktúrami sme dokonca schopní ovládať svetlo. Na začiatku tejto práce sa venujeme optimalizovaniu procesu elektrónovej litografie pre výrobu 50nm vysokých kovových nanodiskov s priemermi 40–200nm. V druhej časti skúmame optickú odozvu zlatých nanodiskov, aby sme lepšie pochopili povahu plazmonických rezonancií a interakcií medzi nimi. V poslednej časti sa venujeme optimalizácii výroby polykryštalického VO2 a meraniam optických odoziev VO2 a FeRh nanodiskov počas ich fázovej premeny. Pri meraní VO2 nanodiskov v dielektrickej fázi sme pozorovali Mieho rezonancie. Tieto nanodisky sa majú potenciál chovať ako laditeľné plazmonické štruktúry, ktorých Mieho rezonancie v dielektrickej fázy VO2 sa menia na plazmonické rezonancie v kovovej fázy. Počas merania FeRh nanodiskov sme pozorovali plazmonické rezonancie vo viditeľnom spektre. Tieto rezonancie môžu byť použité na zníženie energie potrebnej na prechod FeRh z anti-feromagnetickej do feromagnetickej fázy.
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Characterization of structures fabricated by selective wet etching of silicon
Metelka, Ondřej ; Mikulík, Petr (referee) ; Šamořil, Tomáš (advisor)
The task of master’s thesis was to perform optimalization process for preparing metal etching mask by electron beam litography and subsequent selective wet ething of silicon with crystalographic orientation (100). Further characterization of etched surface and fabricated structures was performed. In particular, attention was given to the morphology demonstrated by scanning electron microscopy and study changes of the optical properties of gold plasmonic antennas due to their undercut.
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Metallic nanostructures with three-dimensional topography for plasmonics
Rovenská, Katarína ; Kvapil, Michal (referee) ; Ligmajer, Filip (advisor)
Due to high concentration of free electrons, metallic nanostructures can support plasmonic resonances. The spectral shape of plasmonic resonances may be tuned by many factors and because of it, the field of their application, given by their capability of focusing light under the diffraction limit, broadens. This thesis deals with fabrication of gold nanostructures by electron beam litography on top of a silicon substrate. The topography of the substrate is subsequentially modified by wet anistropic etching. A part of this thesis also briefly reviews methods for fabrication of nanostructures with planar or three-dimensional topography. Using the infrared spectroscopy, this thesis further analyzes the effect of size, shape, spacing of the nanostructures, and also the substrate topography on the optical response of the fabricated nanostructures. The outcomes of this thesis verify previously described tendencies of spectral relations between optical properties and named parameters in the mid-infrared region.
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Plasmonically active nanostructures for optical filtering
Idesová, Beáta ; Liška, Jiří (referee) ; Rovenská, Katarína (advisor)
This bachelor’s thesis deals with optical color filters composed of plasmonically active nanostructures and studies the parameters which influence the performance of such filters. Using electron beam litography and selective reactive ion etching, plasmonic hole-like filters were prepared in alumina film on fused silica substrate. The fabricated arrays of nanostructures, acting as optical filters, varied in shape and size of the nanostructures, distances among the nanostructures and their lateral arrangement within the arrays. The influence of these factors on transmission spectra of plasmonic filters was experimentally analysed using optical spectroscopy. A majority of the observed alternations of the measured transmission spectra was consistent with the research study which is, as well, part of this thesis. The highest color filtering selectivity was observed in arrays with divided square structure shape which also exhibited decent transmittance.
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Arrays of plasmonic nanostructures made of phase-change materials
Kepič, Peter ; Kejík, Lukáš (referee) ; Ligmajer, Filip (advisor)
Kryštálovú štruktúru materiálov s fázovou premenou dokážeme meniť dodaním vonkajšej energie, čo má za následok zmenu ich elektrických alebo magnetických vlastností. Hoci sa tento efekt ovládania plazmonických rezonancií v nanofotonike využíva, dva materiály zvolené v tejto práci — oxid vanadičitý (VO2) a zliatina železa a ródia (FeRh) — neboli zatiaľ dostatočne preskúmané. Plazmonické rezonancie môžu byť charakterizované ako rezonancie electromagnetického poľa v kovovvých nanoštruktúrach. Týmito nanoštruktúrami sme dokonca schopní ovládať svetlo. Na začiatku tejto práce sa venujeme optimalizovaniu procesu elektrónovej litografie pre výrobu 50nm vysokých kovových nanodiskov s priemermi 40–200nm. V druhej časti skúmame optickú odozvu zlatých nanodiskov, aby sme lepšie pochopili povahu plazmonických rezonancií a interakcií medzi nimi. V poslednej časti sa venujeme optimalizácii výroby polykryštalického VO2 a meraniam optických odoziev VO2 a FeRh nanodiskov počas ich fázovej premeny. Pri meraní VO2 nanodiskov v dielektrickej fázi sme pozorovali Mieho rezonancie. Tieto nanodisky sa majú potenciál chovať ako laditeľné plazmonické štruktúry, ktorých Mieho rezonancie v dielektrickej fázy VO2 sa menia na plazmonické rezonancie v kovovej fázy. Počas merania FeRh nanodiskov sme pozorovali plazmonické rezonancie vo viditeľnom spektre. Tieto rezonancie môžu byť použité na zníženie energie potrebnej na prechod FeRh z anti-feromagnetickej do feromagnetickej fázy.
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