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National Repository of Grey Literature

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Modification of the Schottky Fe ZrO/W electron emitter Matějka, František ; Horáček, Miroslav ; Kolařík, Vladimír ; Král, Stanislav A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection. We studied the influence of both the surface treatment and the change of the shape of the tip on the emission characteristics. Detailed record

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