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National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Control of reactive magnetron sputtering
 Dušek, Jan ; Boušek, Jaroslav (referee) ; Ing. Tomáš Fořt, Ph.D., ÚPT AVČR, Brno (advisor)
Bachelor's thesis concisely describes technology of reactive magnetron sputtering and deals with the design and realization of controlling program. For this purpose it was created the control program for steering of individual components of apparatus PLS 160 in programming enviroment Labview. On basis of the knowledge of technological process and procedures of reactive magnetron sputtering the automatic program was created. This program can be modified using recipes. Besides program structures mechanical and electrical changes of apparatus were made. The entire automated process was tested.
Detailed record
Control of reactive magnetron sputtering
 Dušek, Jan ; Boušek, Jaroslav (referee) ; Ing. Tomáš Fořt, Ph.D., ÚPT AVČR, Brno (advisor)
Bachelor's thesis concisely describes technology of reactive magnetron sputtering and deals with the design and realization of controlling program. For this purpose it was created the control program for steering of individual components of apparatus PLS 160 in programming enviroment Labview. On basis of the knowledge of technological process and procedures of reactive magnetron sputtering the automatic program was created. This program can be modified using recipes. Besides program structures mechanical and electrical changes of apparatus were made. The entire automated process was tested.
Detailed record

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