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Studium plasmy v hybridním PLD systému pro přípravu CN.sub.x./sub. vrstev Novotný, Michal ; Jelínek, Miroslav ; Bulíř, Jiří ; Lančok, Ján ; Zelinger, Zdeněk We have developed hybrid PLD systems (combination of PLD and additional radiofrquency discharges) for increasing active nitrogen concentration in plasma and consequently N/C ratio in deposited films. For study of plasma and plasma processes we have used OES Detailed record

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