|
|
In-situ characterization of semiconductors using scanning probe microscopy techniques
Očkovič, Adam ; Pléha, David (referee) ; Pavera, Michal (advisor)
The thesis focuses on the analysis of semiconductor components using scanning probe microscopy. In the first part, crystalline substances are classified according to their electrical properties. Then, the theory of intrinsic and extrinsic semiconductors, PN transitions and finally the basic types and functions of transistors are introduced. In the second section, SPM techniques and their principles of operation are presented, which are suitable for failure analysis of semiconductor devices. The third chapter introduces the measurement setup, which consists of a scanning electron microscope MIRA and a scanning probe microscope LiteScope, which uses self-sensing probes. In the fourth chapter, the semiconductor samples analyzed were tungsten plugs in a cross-section of CMOS chip, a cross-section of bipolar transistor, and a lamella of unipolar MOSFET transistor. Analysis of these samples was performed using AFM, CAFM, EFM, KPFM and SSRM techniques in the last chapter. For each technique and sample, an analysis of the measured data was performed. Together with the techniques, the basic limitations and interesting outputs for failure analysis were presented.
|
|
|
Mechanical excitation of self sensing SPM probes
Novotný, Ondřej ; Piastek, Jakub (referee) ; Pavera, Michal (advisor)
This bachelor thesis deals with the development of the SPM microscope probe holder which is designed for mechanical excitation of the probes. The first part of the thesis focuses on the description of physical theory, such as the principle of atomic force microscopy, the function of piezoceramics and the description of used quartz tunning fork based probes. The second part describes the gradual development and design of the new probe holder. Testing of the designed probe holder and comparison of mechanical and electric excitation is depicted at the end of this work. The designed probe holder was manufactured, the assembly procedure was described, and the drawings of the individual parts were created.
|
|
|
Local electrical conductivity measurements in AFM tapping mode
Dao, Radek ; Konečný, Martin (referee) ; Pavera, Michal (advisor)
This bachelor thesis is concerned about the development of a probe for local electrical conductivity measurements in tapping mode Atomic Force Microscopy. The teoretical part gives a short overview of Scanning Probe Microscopy techniques, with the focus being on Conductivity Atomic Force Microscopy. Furthermore, the measuring regime in which the probe operates is described here, as well as the basic component of the probe, the quartz tuning fork. The experimental part follows the iterative development process, and contains a chapter dedicated to making of very sharp tips. The final chapters describe the preparation of test samples, which were used to prove the functionality of the probe and the measurement of local electrical conductivity itself.
|
|
|
Self-sensing SPM probes for measuring electrical properties of materials
Očkovič, Adam ; Vařeka, Karel (referee) ; Pavera, Michal (advisor)
The bachelor's thesis is focused on the modification of probes with an integrated sensor usable for measuring conductivity characteristics of surfaces in atomic force microscopy. The first part presents the theory concerning atomic force microscopy, conductivity measurement and deposition using an ion beam. Furthermore, the method of production and limitation of the use of electrically conductive probes with optically read deflection is described. The practical part presents the main problems of probes with integrated sensors in conductivity measurements. Furthermore, the modification of the probes themselves, the measurements made with these probes and suggestions for improving the properties of the probes are described.
|
|
|
Self-sensing SPM probes for measuring electrical properties of materials
Očkovič, Adam ; Vařeka, Karel (referee) ; Pavera, Michal (advisor)
The bachelor's thesis is focused on the modification of probes with an integrated sensor usable for measuring conductivity characteristics of surfaces in atomic force microscopy. The first part presents the theory concerning atomic force microscopy, conductivity measurement and deposition using an ion beam. Furthermore, the method of production and limitation of the use of electrically conductive probes with optically read deflection is described. The practical part presents the main problems of probes with integrated sensors in conductivity measurements. Furthermore, the modification of the probes themselves, the measurements made with these probes and suggestions for improving the properties of the probes are described.
|
|
|
Mechanical excitation of self sensing SPM probes
Novotný, Ondřej ; Piastek, Jakub (referee) ; Pavera, Michal (advisor)
This bachelor thesis deals with the development of the SPM microscope probe holder which is designed for mechanical excitation of the probes. The first part of the thesis focuses on the description of physical theory, such as the principle of atomic force microscopy, the function of piezoceramics and the description of used quartz tunning fork based probes. The second part describes the gradual development and design of the new probe holder. Testing of the designed probe holder and comparison of mechanical and electric excitation is depicted at the end of this work. The designed probe holder was manufactured, the assembly procedure was described, and the drawings of the individual parts were created.
|
|
|
Local electrical conductivity measurements in AFM tapping mode
Dao, Radek ; Konečný, Martin (referee) ; Pavera, Michal (advisor)
This bachelor thesis is concerned about the development of a probe for local electrical conductivity measurements in tapping mode Atomic Force Microscopy. The teoretical part gives a short overview of Scanning Probe Microscopy techniques, with the focus being on Conductivity Atomic Force Microscopy. Furthermore, the measuring regime in which the probe operates is described here, as well as the basic component of the probe, the quartz tuning fork. The experimental part follows the iterative development process, and contains a chapter dedicated to making of very sharp tips. The final chapters describe the preparation of test samples, which were used to prove the functionality of the probe and the measurement of local electrical conductivity itself.
|
guest ::
