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Analysis of the influence of the gas flow in the placement of the sample in the chamber of the environmental scanning electron microscope
Bednář, Eduard ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
This thesis deals with the simulation of fluid dynamics in environmental scanning electron microscope and evaluate solvers setup, the degree of discretization, choice of turbulent model and proposal optimal design of environmental scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, software SolidWorks and ANSYS Fluent, basic equations describing fluid status, fluid turbulence, the mean free path of molecules and electron scattering. The practical part of the thesis is to create the model of environmental scanning electron microscope AQUASEM II in CAD system SolidWorks and simulation of fluid flow in the sample chamber before aperture PLA1 by ANSYS Fluent. A series of simulations provided the perfect setting solver. These knowledge are used in the second stage of the practical part, where is proposed optimal shape of the table sample and the input aperture PLA1.
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Influence of working conditions on the signal level detected by BSE detector
Bednář, Eduard ; Zimáková, Jana (referee) ; Čudek, Pavel (advisor)
This thesis deals with the evaluation of the quality of the signal level of backscattered electrons detected by the scintillation backscattered electron detector depending on the working conditions in low vacuum scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, the principle of generation the signal and detection of backscattered electrons. The experimental part of the thesis is to measure the properties of the scintillation detector of backscattered electrons. A series of experiments is evaluated the influence of working conditions on the stability and function of the detector of backscattered electron.
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Influence of working conditions on the signal level detected by BSE detector
Bednář, Eduard ; Zimáková, Jana (referee) ; Čudek, Pavel (advisor)
This thesis deals with the evaluation of the quality of the signal level of backscattered electrons detected by the scintillation backscattered electron detector depending on the working conditions in low vacuum scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, the principle of generation the signal and detection of backscattered electrons. The experimental part of the thesis is to measure the properties of the scintillation detector of backscattered electrons. A series of experiments is evaluated the influence of working conditions on the stability and function of the detector of backscattered electron.
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Analysis of the influence of the gas flow in the placement of the sample in the chamber of the environmental scanning electron microscope
Bednář, Eduard ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
This thesis deals with the simulation of fluid dynamics in environmental scanning electron microscope and evaluate solvers setup, the degree of discretization, choice of turbulent model and proposal optimal design of environmental scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, software SolidWorks and ANSYS Fluent, basic equations describing fluid status, fluid turbulence, the mean free path of molecules and electron scattering. The practical part of the thesis is to create the model of environmental scanning electron microscope AQUASEM II in CAD system SolidWorks and simulation of fluid flow in the sample chamber before aperture PLA1 by ANSYS Fluent. A series of simulations provided the perfect setting solver. These knowledge are used in the second stage of the practical part, where is proposed optimal shape of the table sample and the input aperture PLA1.
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