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Deposition and Characerization of Protective DLC Coatings on Viscoelastic Substrates
Buršíková, V. ; Bochníček, Z. ; Franta, D. ; Sťahel, P. ; Kelar, L. ; Buršík, Jiří ; Klapetek, P. ; Bláhová, O. ; Peřina, Vratislav ; Zemek, J. ; Zajíčková, L.
Deposition and characerization of protective DLC Coatings on viscoelastic substrates.
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Studium mechanických vlastností DLC tenkých vrstev deponovaných v jedno a dvoufrekvenčním kapacitním výboji
Buršíková, V. ; Stoica, A. ; Sobota, Jaroslav ; Grossman, Jan ; Fořt, Tomáš ; Klapetek, P. ; Buršík, Jiří ; Bláhová, O.
Nanostructured diamond-like carbon coatings were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges (LF=100-300kHz, HF =13.56 MHz). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.
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Studium mechanických vlastností gradovaných amorfních DLC povlaků deponovaných PECVD
Buršíková, V. ; Stoica, A. ; Sobota, Jaroslav ; Grossman, Jan ; Fořt, Tomáš ; Klapetek, P. ; Buršík, Jiří ; Peřina, Vratislav ; Bláhová, O.
For optimisation of performance of the coating there is necessary to optimise the following materials parameters: the elastic modulus, hardness, surface strength, film fracture toughness and film-substrate adhesion. We proposed to protect the substrate surface with graded coating, which has monotonically graded elastic modulus and Poisson's ratio.
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