Národní úložiště šedé literatury Nalezeno 1 záznamů.  Hledání trvalo 0.02 vteřin. 
Defect localization and analysis in GaN
Gazdík, Richard ; Šik, Ondřej (oponent) ; Bábor, Petr (vedoucí práce)
This master’s thesis is concerned with the localisation and analysis of threading dislocations in GaN epitaxial layers. The thesis is divided into two parts – theoretical and experimental. The theoretical part explains the origin and nature of threading dislocations. Additionally, it lays foundations for a better understanding of perhaps less known techniques, which can be used to study them – electron channeling contrast imaging and defect-selective etching. The experimental part describes the procedures done to carry these techniques, in addition to TEM diffraction-contrast imaging and its associated FIB sample preparation, out. We show that each of the techniques can be used independently to characterize threading dislocations, but that there is a possibility to gain complementary information by combining them.

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