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Adaptive scanning based on lower resolution images
Dymáček, Michal ; Klapetek, Petr (oponent) ; Pavera, Michal (vedoucí práce)
The presented diploma thesis is devoted to the development of an adaptive scanning approach based on lower resolution images with the aim of overall scan duration reduction to open up new applications of SPM techniques, namely the Atomic force microscopy (AFM), in fields such as life sciences and the semiconductor industry. In the proposed approach, a low resolution image is initially acquired, which is then artificially upscaled by means of interpolation, and processed to create a speed map for a second round of scanning conducted with line-based speed control. This method allows lines containing elevated features to be scanned slowly for necessary precision and lines consisting of the substrate surface to be scanned quickly to reduce the overall scan duration. Based on a theoretical and experimental analysis of individual steps, an adaptive scanning approach is designed utilizing the scripting module of the SPM microscope LiteScope based on Python. With its application, a scan duration reduction of 30 % was achieved for the TGQ1 calibration grid.

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