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Photonometers for coating and sputtering machines
Oupický, Pavel ; Jareš, Daniel ; Václavík, Jan ; Vápenka, David
The concept of photonometers (alternative name of optical monitor of a vacuum deposition process)for coating and sputtering machines is based on photonometers produced by companies like SATIS or HV Dresden. Photometers were developed in the TOPTEC centre and its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for more than 10 years. The article describes current status of the technology and ideas which will be incorporated in next development steps. Hardware and software used on coating machines B63D, VNA600 and sputtering machine UPM810 is presented.
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Irregular surfaces - measurements and ZEMAX simulations
Melich, Radek ; Psota, Pavel ; Lédl, Vít ; Václavík, Jan
Surfaces produced on optical elements are loaded by dierent kinds of irregularities whose allowable amplitudes are prescribed by optical tolerances defined by an optical designer. An important feedback between realized and designed surfaces can be achieved using interferometry or profilometry measurements for instance. This article discusses dierent kinds of representation and visualization of those measurements in ZEMAX, enabling optical designer to evaluate an impact of the irregular surface on the optical system performance.
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Prospects of digital holographic interferometry in heat transfer measurement
Doleček, R. ; Lédl, Vít ; Kopecký, V. ; Psota, P. ; Václavík, Jan ; Vít, Tomáš
In the measurement of heat transfer problem, a holographic interferometry (HI) is often used mainly because of its unique properties and very high adaptability to different sort of problems under investigation. Although in the area of vibration or deformation measurement of solid body the standard HI is replaced massively by digital holography in the case of refractive index distribution the situation is quite opposite. In this paper we present two different types of digital holographic interferometers. The interferometers with different sensitivities have been build and successfully tested.
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