|
|
Studium defektů v tenkých kovových vrstvách
Hruška, Petr ; Čížek, Jakub (advisor) ; Bulíř, Jiří (referee)
In the present work Mg films prepared by RF magnetron sputtering were studied. Variable energy positron annihilation spectroscopy (VEPAS) was employed for investigation of defects in the Mg films. VEPAS characterization was combined with scanning electron microscopy and X-ray diffraction in order to determine grain size, phase composition and texture. The effect of different deposition rate and deposition temperature, annealing, various substrates and film thickness on the structure and amount of defects present in the Mg films was examined. Defect studies by VEPAS showed that positrons in studied Mg films are trapped at misfit dislocations and at vacancy-like defects in grain boundaries and their density can be reduced by the deposition at elevated temperature. 1
|
|
|
Characterization of highly porous Pd-modified SnO2 sputtered thin films for H2 detection
Chundak, Mykhailo ; Veltruská, Kateřina (advisor) ; Jiříček, Petr (referee) ; Šmíd, Břetislav (referee)
Title: Characterization of highly porous Pd-modified SnO2 sputtered thin films for H2 detection Autor: Mgr. Mykhailo Chundak Department/Institute: Department of Surface and Plasma Science Supervisor of the doctoral thesis: RNDr. Kateřina Veltruská, CSc., Department of Surface and Plasma Science Abstract: This doctoral thesis contains the study of tin dioxide and Pd-doped tin dioxide samples deposited by magnetron sputtering utilizing glancing angle deposition (GLAD). Influence of the deposition parameters on the change of morphology, crystalline structure and chemical state was studied. The samples were characterized by a variety of techniques, such as: X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), synchrotron radiation photoelectron spectroscopy (SRPES), scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HRTEM). Prepared samples showed high porosity which could be controlled by deposition parameters (angle of the deposition, gas pressure and power of magnetron discharge). Highly porous SnO2 GLAD samples and Pd modified SnO2 GLAD samples were deposited on the substrates at room temperature and 300 řC. These samples were found to be polycrystalline with certain fraction of amorphous contribution, given by preparation conditions. The size of the...
|
|
|
Surface modification by means of metallic and polymeric nanoparticles
Steinhartová, Tereza ; Hanuš, Jan (advisor) ; Matoušek, Jindřich (referee)
The theoretical part deals with basic characteristics of low-temperature, low-pressure plasma. It also describes the principles of preparation of polymer and nanocomposite films using this type of plasma. It further explains the basic principles of methods used to characterize our samples. The experimental section shows a technology to produce hard polymeric coatings with metal (Cu) nanoparticles (NPs) fabricated by gas aggregation source (GAS). This approach has an important advantage that Cu concentration and matrix properties can be controlled independently. Characterization of the films in terms of chemical composition, morphology, optical and mechanical properties is described here alongside with description of Cu NPs production using GAS with variable aggregation length. The a- C:H matrix was deposited in a mixture of Ar and n-hexane on the substrates placed on a RF electrode. The beam of the NPs was normal to the substrate plane. In this arrangement it was possible to control hardness of the films and by operational parameters of the GAS also the amount of the NPs in the film. In the last section fabrication of nanocomposite films of titanium and nylon NPs is shown. Powered by TCPDF (www.tcpdf.org)
|
|
|
Deposition of thin metal layers by vacuum magnetron sputtering device
Rogozhnikova, Mariia ; Hylský, Josef (referee) ; Strachala, Dávid (advisor)
This bachelor’s thesis is focused on description of magnetron sputtering device NP 12 for the thin metal layers forming. In this work is mentioned the issue of metal layers, is given an overview of the methods of their forming and description of magnetron sputtering. Practical part of this thesis describes creation of the NP 12 sputtering device controlling instructions and creation of ten working samples. Copper, aluminum, and titanium layers were sputtered on a glass and silicon substrate bases. An appropriate processing parameters have been defined experimentally. The conclusion of this final work gives analyzes of surface flatness and purity of the sputtered layers using AFM and SEM measurements methods.
|
|
|
Ultrathin films deposited by means of magnetron sputtering and their characterization
Petr, Martin ; Kylián, Ondřej (advisor) ; Straňák, Vítězslav (referee) ; Tichý, Milan (referee)
Presented work is focused on the deposition and characterization of thin and ultrathin plasma polymer films, then also on the preparation of nanocomposites metal/plasma polymer. The characterization of plasma polymer films was partly done in-situ without exposing the samples to the atmosphere. The thickness of prepared films was measured by spectral ellipsometry, the chemical composition was measured by XPS. The morphology and optical properties of deposited films were measured ex-situ. It is shown that during the initial stages of growth the properties of plasma polymer films depend on their thickness and also on the material of the substrate. Many interesting applications were explored for prepared nanocomposites metal/plasma polymer. They can be used as superhydrophobic coatings, gradient coatings, substrates for Raman spectroscopy or as antibacterial coatings. Moreover, special optical properties of prepared nanocomposites were studied in detail. Presented work has an experimental character.
|
|
|
Study of new catalytic materials for proton exchange membrane fuel cells
Homola, Petr ; Matolín, Vladimír (advisor) ; Jiříček, Petr (referee)
Title: Study of new catalytic materials for proton exchange membrane fuel cells Author: Petr Homola Department: Department of Surface and Plasma Science Supervisor: Prof. RNDr. Vladimír Matolín, DrSc. Abstract: Submitted thesis deals with study of thin layers based on platinum and cerium oxides in order to use them in fuel cells with polymer membrane (PEM- FC). A set of samples with different amount of platinum was prepared by means of magnetron sputtering. Samples were investigated by X - ray Photoelectron Spectroscopy (XPS) and results were confronted with sputtering parameters. It was found out that chemical state of platinum is related to its amount in thin layer. The less platinum was contained in thin layer, the less amount of Pt0 state was observed and amounts of Pt2+ and Pt4+ states increased. Furthermore the temperature stability of prepared layers in the interval from room temperature to 250 ◦ C was studied by means of XPS. The adsorption of carbon monoxide was measured by infrared absorption spectroscopy (IRAS). Increasing degree of adsorption on sample probably related to platinum reduction with increased tem- perature was observed. Measurements of other samples were devaluated by strong contamination with nickel carbonyls. Keywords: PEMFC, cerium oxide, magnetron sputtering, XPS, CO adsorption
|
|
| |
|
| |
|
|
Plasma preparation of metal and oxide layers on ceramic and plastic substrates.
Olejníček, Jiří
Contract research was focused on preparation and optimization of the plasma deposition process of selected thin metal and semiconducting oxide layers with required optical properties. The goal was to prepare transparent color electrochromic films on thermally sensitive substrates, the layers with high refractive index on the surface of pressed plastic structures and shiny metallic films on the porous ceramic masks.\n
|
|
|
Deposition of functional thin films by plasma processes
SEZEMSKÝ, Petr
An aim of this work is a research of a deposition process of indium tin oxide by plasma assisted methods. The thesis deals with plasma diagnostics, e.g. Langmuir probe diagnostics and optical emission spectroscopy, as well as describes experiments of film deposition including their diagnostics, e.g. absorption spectroscopy, X-ray diffractometry and atomic force microscopy.
|
guest ::
