National Repository of Grey Literature 34 records found  beginprevious34 - 34  jump to record: Search took 0.01 seconds. 
Design of aparature for RF plasma etching
Bárdy, Stanislav ; Bábor, Petr (referee) ; Mach, Jindřich (advisor)
This bachelor's thesis deals with a design of an ICP (Inductively Coupled Plasma) apparatus. The theoretical part consists of a research of a plasmatic graphene surface cleaning. Next are described plasma generation methods and an RF circuit design. The experimental part deals with a construction of the ICP apparatus and the impedance matching box, an optical diagnostics of a plasma discharge and a measurement of PMMA etching parameters (etch rate, roughness) by a spectroscopic reflectometry and an atomic force microscopy.

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