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Correlative tomography
Vařeka, Karel ; Touš,, Jan (referee) ; Bábor, Petr (advisor)
Předložená diplomová práce se zabývá korelativním přístupem multimodální analýzy struktur prokovování s různým rozlišením. Výzkum je součástí mezinárodního projektu týkajícího se charakterizace poruch zmíněných struktur, které jsou implementovány v polovodičových zařízeních. Kombinace korelativní mikroskopie a tomografie technikami NanoXCT, FIB-SEM (EDS), FIB-SIMS a AFM byla navržena k zavedení opakovatelného pracovního postupu. Tomografie fokusovaným iontovým svazkem je metoda přesného odprašování v řezech, která mimo jiné v každém průřezu získává cenné snímky s vysokým rozlišením (FIB-SEM) nebo mapy chemického složení (FIB-SIMS). Následující transformace obrazu umožňuje identifikaci defektů jako funkci hloubky ve struktuře. Práce dále věnuje pozornost metodám sjednocení obrazů za účelem optimální prezentace získaných dat.
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Effect of implantation of C, Si and Cu into ZrNb nanometric multilayers
Daghbouj, N. ; Karlík, M. ; Lorinčík, J. ; Polcar, T. ; Callisti, M. ; Havránek, Vladimír
Sputter-deposited Zr/Nb nanometric multilayer films with a periodicity (L) in the range from 6 to 167 nm were subjected to carbon, silicon and copper ion irradiation with low and high fluences at room temperature. The ion profiles, mechanical proprieties, and disordering behavior have been investigated by using a variety of experimental techniques (Secondary Ion Mass Spectrometry - SIMS, nanoindentation, X-ray diffraction - XRD, and scanning transmission electron microscopy - STEM). On the STEM bright field micrographs there is damage clearly visible on the surface side of the multilayer. Deeper, the most damaged and disordered zone, located close to the maximum ion concentration, was observed. The in-depth C and Si concentration profiles obtained from SIMS were not affected by the periodicity of the nanolayers. This is in accordance with SRIM simulations. XRD and electron diffraction analyses suggest a structural evolution in relation to L. After irradiation, Zr (0002) and Nb (110) reflexions overlap for L=6 nm. For the periodicity L > 6 nm the Zr (0002) peak is shifted to higher angles and Nb (110) peak is shifted to lower angles.
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Tomographical analysis of semiconductor devices by FIB-SIMS
Mičulka, Martin ; Voborný, Stanislav (referee) ; Bábor, Petr (advisor)
This thesis deals with a tomographic analysis of the structure of through-silicon via utilizing TOF-SIMS; a method used in electrotechnical industry. A focused ion beam isused to create a cross section of a semiconductor to reveal its inner structure. Afterwards a newly created surface is analysed by TOF-SIMS to determine its chemical composition. A series of 2D images is created which are used for tomographic reconstruction of the through-silicon via. Moreover, the thesis deals with an optimization of FIB-SIMS method by employing oxygen ion beam for improvement of ionized sputter yield and for artifacts reduction. A measurement of instability of bismuth ion beam is demonstrated as well.
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Quantitative analysis of matrix elements using SIMS and LEIS methods
Staněk, Jan ; Šik, Ondřej (referee) ; Bábor, Petr (advisor)
This thesis studies comparison and connection of two spectrometric methods – low energy ion scattering spektrometry (LEIS) and secondary ion mass spectrometry (SIMS). SIMS method, despite its many positive qualities, suffers of so called matrix effect, which makes quantifiaction of data very difficult. LEIS method on the other hand is immune to this effect and so it’s suitable completion of SIMS method. As a convenient sample have been chosen AlGaN samples with various concentration of gallium and aluminium. In the first part of thesis is introduced physical essence of SIMS and LEIS method, experimental details and studied samples. In second part of the thesis there’s a description of measurements and comparison of data gained by each method.
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2D and 3D analysis of semiconductor devices by SIMS
Vařeka, Karel ; Šamořil, Tomáš (referee) ; Bábor, Petr (advisor)
The chemical analysis of semiconductor structures using the SIMS method is the main part of this bachelor thesis. It allows the user to make a depth profiling and a creation of 2D or 3D material images. During the analysis of the chip from the TIGBT semiconductor, there is a sputtering of a heterogeneous structure in the material with different sputtering rates. It is convenient to make a cut through the material using a focused ion beam to create a profile, which grants the user to perform a tomographic measurement. This new surface enables a chemical analysis of a depth profile of semiconductor structures without the need for sputtering beam in dynamic SIMS mode. By reconstructing individual two-dimensional images, it is possible to assemble a three-dimensional pattern of the analysed sample area. Also, the preparation and removal of the lamella from the TIGBT chip were accomplished and analysed via a detector of transmission electrons.
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Preparation of sample cross-sections and analysis by SIMS
Karlovský, Juraj ; Pechal, Radim (referee) ; Bábor, Petr (advisor)
This thesis studies possible methods of semiconductor sample measurement by SIMS, with emphasis on testing different measurement parameters and sample preparation. Part of this master thesis deals with the design of a modified sample holder compatible with the used ToF-SIMS$^{5}$ instrument, IONTOF company, which is capable of tilting the sample by defined angle. This holder enables sample preparation in the main chamber of the instrument without the need of transferring the sample between instruments, which limits the probability of sample contamination. This sample holder was tested by ion machining of TIGBT sample edge and by imaging of a crater edge, created in previous measurement. Edge termination structures prepared by different techniques were measured on the TIGBT samples. Further measurements with the goal of optimizing the depth resolution for thin layers were done on Molybdenum-Silicon-multilayer X-Ray Mirror. Part of the measurements was focused on comparing depth profiles measured at low temperatures. For these measurements the samples with Indium multilayers in GaN substrate were used.
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Analysis of advanced materials and structures by SIMS method
Holeňák, Radek ; Kalousek, Radek (referee) ; Bábor, Petr (advisor)
Bachelor theasis deals with the study of advanced materials by SIMS method and the possibilities of kvantitative analysis using maesured data. Chemical analysis of the ceramic surface in order to optimize the measurement conditions was performed. The rest of the work uses the data output from the measurement to describe the internal microstructure of the material. Using sophisticated methods, Si precipitates in the AlSi layer are localized and described, and the formation of the MgAl2O4 phase in ceramic samples is confirmed. Achieving all the set goals reveals the potential of the SIMS method and, above all, the possibility of processing the data output from the measurements.
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Elemental and isotopic study of differentiated meteorites and implications for the origin and evolution of their parent bodies
Halodová, Patricie ; Košler, Jan (advisor) ; Řanda, Zdeněk (referee) ; Kanický, Viktor (referee)
ELEMENTAL AND ISOTOPIC STUDY OF DIFFERENTIATED METEORITES AND IMPLICATIONS FOR THE ORIGIN AND EVOLUTION OF THEIR PARENT BODIES Iron meteorites are differentiated meteorites composed largely of Fe-Ni alloys. The metallic phase of many iron meteorites shows a texture called the Widmanstätten pattern, which develops as a two-phase intergrowth of kamacite (α-bcc, ferrite) and taenite (γ-fcc, austenite), and forms by nucleation and growth of kamacite from taenite during slow cooling of the parent body. Selected iron meteorites - octahedrites of different structural and chemical groups (Canyon Diablo, Toluca, Bohumilitz, Horh Uul, Alt Biela, Nelson County, Gibeon and Joe Wright Mountain) were studied with intention to evaluate the scale and extent of Fe isotopic heterogeneities in iron meteorites and to find the possible link between the isotopic variations and thermal histories of the respective meteorite parent bodies. The Fe isotopic compositions of kamacite and taenite in the studied meteorites, obtained by three independent analytical techniques with different spatial resolution capabilities (laser ablation and solution MC ICP-MS and SIMS) show significant variations of up to ~4.5‰ in δ56 Fe. The taenite is isotopically heavier compared to kamacite in all studied meteorites. There is no correlation...
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Noise, Transport and Structural Properties of High Energy Radiation Detectors Based on CdTe
Šik, Ondřej ; Lazar, Josef (referee) ; Navrátil, Vladislav (referee) ; Grmela, Lubomír (advisor)
Poptávka ze strany vesmírného výzkumu, zdravotnictví a bezpečnostního průmyslu způsobila v posledních letech zvýšený zájem o vývoj materiálů pro detekci a zobrazování vysokoenergetického záření. CdTe a jeho slitina CdZnTe. jsou polovodiče umožnují detekci záření o energiích v rozsahu 10 keV až 500 keV. Šířka zakázaného pásma u CdTe / CdZnTe je 1.46 -1.6 eV, což umožňuje produkci krystalů o vysoké rezistivitě (10^10-10^11 cm), která je dostačující pro použití CdTe / CdZnTe při pokojové teplotě. V mé práci byly zkoumány detektory CdTe/CdZnTe v různých stádiích jejich poruchovosti. Byly použity velmi kvalitní spektroskopické detektory, materiál s nižší rezistivitou a výraznou polarizací, detektory s asymetrií elektrických parametrů kontaktů a teplotně degenerované vzorky. Z výsledků analýzy nízkofrekvenčního šumu je patrný obecný závěr, že zvýšená koncentrace defektů způsobí změnu povahy původně monotónního spektra typu 1/f na spektrum s výrazným vlivem generačně-rekombinačních procesů. Další výrazná vlastnost degenerovaných detektorů a detektorů nižší kvality je nárůst spektrální hustoty šumu typu 1/f se vzrůstajícím napájecím napětí se směrnicí výrazně vyšší než 2. Strukturální a chemické analýzy poukázaly, že teplotní generace detektorů způsobuje difuzi kovu použitého při kontaktování a stopových prvků hlouběji do objemu krystalu. Část mé práce je věnována modifikaci povrchu svazkem argonových iontů a jejímu vlivu na chemické složení a morfologii povrchu.
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SDN Controlled According to User Identity
Holkovič, Martin ; Ryšavý, Ondřej (referee) ; Polčák, Libor (advisor)
The aim of this work is to connect dynamic identity management system developed under the project Sec6Net with a control of SDN network. The controller Pyretic is used for network control, which allows application development by using the match-action rules. Interface between the identity management system and controller Pyretic is designed and implemented in both systems. To prove the concept, selected use cases related to security, routing and accounting are created. The use cases are implemented as applications for Pyretic controller. All programs were tested in networking laboratory according to the possibilities. The main contribution of this work is to simplify and improve the management of computer networks while providing new capabilities to administrators of these networks and ultimately their users.
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