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National Repository of Grey Literature 128 records found  beginprevious128 - 128  jump to record: Search took 0.00 seconds. 
Sběrová účinnost detektoru sekundárních elektronů v REM
 Konvalina, Ivo ; Müllerová, Ilona
In order to collect the secondary electrons (SE), scanning electron microscopes (SEM) are equipped with the Everhart-Thornley (ET) type detector. The electrostatic field of the front grid, biased to a positive potential of several hundred volts , is to attract all SE of kinetic energy below 50 eV or at least those from the SE spectrum peak at 1(3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one, which is mainly given by their low collection efficiency. The electrostatic field of the grid cannot sufficiently penetrate toward the specimen and influence the trajectories of SE owing to grounded electrodes surrounding the specimen (specimen alone and its holder, specimen stage, pole piece of the objective lens, etc)
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