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Design and realization of a high-voltage power generator f=13.56 MHz
 Potúček, Patrik ; Drexler, Petr (oponent) ; Fiala, Pavel (vedoucí práce)
This thesis deals with the design and practical realization of a high-voltage power generator, which works at a frequency of f = 13.56 MHz. Thesis also deals with the design of a probe dedicated to measuring the electro-magnetic spectrum of the plasma. The probe should be able to work in the frequency range of f = 0 - 500 MHz. State of the art in the field of plasma generation and plasma diagnostics are discussed.
Úplný záznam
Optimization of HV power generator f = 13.56 MHz
 Potúček, Patrik ; Drexler, Petr (oponent) ; Fiala, Pavel (vedoucí práce)
This thesis deals with the optimization of a high-frequency class D power generator, designed for power excitation of a plasma chamber operating at frequency f = 13.56 MHz. The main goal is to optimize generator parameters to ensure best performance regarding the given plasma chamber, whose intended application is to affect the surface of the materials: improvement of the surface wettability, or modification of materials electrical properties: for example, an increasement of dielectric strength of insulators. For the purpose of the generator’s output power monitoring and electromagnetic parameters measurement, a suitable set of sensors which are able to repeatedly measure up to frequency fm = 400 MHz were constructed. A probe for electrical field intensity E evaluation was constructed and tested. This probe is used in the vicinity of plasma incidence on the sample surface. Constructed device (power generator – plasma chamber – sensors) was subjected to tests and results are briefly discussed.
Úplný záznam
Design and realization of a high-voltage power generator f=13.56 MHz
 Potúček, Patrik ; Drexler, Petr (oponent) ; Fiala, Pavel (vedoucí práce)
This thesis deals with the design and practical realization of a high-voltage power generator, which works at a frequency of f = 13.56 MHz. Thesis also deals with the design of a probe dedicated to measuring the electro-magnetic spectrum of the plasma. The probe should be able to work in the frequency range of f = 0 - 500 MHz. State of the art in the field of plasma generation and plasma diagnostics are discussed.
Úplný záznam

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1 Potůček, Petr
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