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Possibilites of a secondary electrons bandpass filter for standard SEM
Mika, Filip ; Pokorná, Zuzana ; Konvalina, Ivo ; Khursheed, A.
Secondary electron filtering in Scanning Electron Microscope (SEM) has been in use for over\na decade. This technique uncovers interesting contrasts in an otherwise ordinary SEM image\nwhich can possibly be used for dopant concentration mapping or for discerning the slight molecular weight differences in apparently homogeneous organic materials. Secondary\nelectron filtering of semiconductor samples seems very promising as it may shed light on the mechanism of SEM image contrast between p-doped and n-doped semiconductors, possibly\nallowing to determine dopant concentration from SEM image alone.

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