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Diffractive Optics: Analysis, Design and Fabrication of Diffractive Optical Elements
Fiala, P. ; Matějka, František ; Richter, I. ; Škereň, M.
This contribution presents results obtained in the field of diffractive optics, covering practically all aspects of the analysis, design and realization process of the diffractive optical elements (DOEs). As for the analysis, using the rigorous diffraction methods, we have recently been able to efficiently analyze various diffraction gratings. Concerning the synthesis, several design strategies have been studied and implemented for designing both binary and multi-level phase DOEs. Using the numerically computed designs, E-beam lithography technology has been chosen for fabricating both binary and multi-level phase DOEs, using the BS 600 e-beam lithographic facility at ISI AS CR. Finally, some typical examples of optical reconstructions are presented and discussed.
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