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MEMS microhotplate platform for chemical sensors
Vančík, Silvester ; Svatoš, Vojtěch (referee) ; Prášek, Jan (advisor)
This master’s thesis deals with design and fabrication of MEMS microhotplate platform for chemical gas sensors. The theoretical part describes MEMS, sensors and processes and technologies needed for fabrication of micro hotplate. The practical part includes simulations, masks and step by step microhotplate fabrication. Fabricated heating membrane was characterized and compared to theoretical values from simulations and to similar devices presented in literature.
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Laboral task of variables measurement by position MEMS sensor
Jarůšek, Jakub ; Vančík, Silvester (referee) ; Hubálek, Jaromír (advisor)
MEMS technology and her products are very used today. One of these products are accelerometers, which are highly used for determining orientation, wear measurement or seismology. Their functions are used for consumer electronics, even for development or diagnostics. For more demanding applications, especially for determining orientation, are used components named gyroscopes (alone or with cooperation with accelerometers).
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Characterization of working electrodes of electrochemical sensors modified by carbon nanomaterials
Vančík, Silvester ; Majzlíková, Petra (referee) ; Prášek, Jan (advisor)
This bachelor thesis deals with electrochemical detection of substances using screen-printed electrochemical sensors. The theoretical part describes thick film technology, sensors, selected parts of electrochemistry, voltammetry and carbon nanomaterials. The practical part includes the modification of standard screen-printed electrode by oxygen plasma and spray-coated carbon nanomaterials and its experimental comparison using cyclic voltammetry and scanning electron microscopy. The measured values were processed and evaluated numerically and graphically. In comparison with standard working electrode, the current responses of both electrodes were improved significantly.
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Laboral task of variables measurement by position MEMS sensor
Jarůšek, Jakub ; Vančík, Silvester (referee) ; Hubálek, Jaromír (advisor)
MEMS technology and her products are very used today. One of these products are accelerometers, which are highly used for determining orientation, wear measurement or seismology. Their functions are used for consumer electronics, even for development or diagnostics. For more demanding applications, especially for determining orientation, are used components named gyroscopes (alone or with cooperation with accelerometers).
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MEMS microhotplate platform for chemical sensors
Vančík, Silvester ; Svatoš, Vojtěch (referee) ; Prášek, Jan (advisor)
This master’s thesis deals with design and fabrication of MEMS microhotplate platform for chemical gas sensors. The theoretical part describes MEMS, sensors and processes and technologies needed for fabrication of micro hotplate. The practical part includes simulations, masks and step by step microhotplate fabrication. Fabricated heating membrane was characterized and compared to theoretical values from simulations and to similar devices presented in literature.
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Characterization of working electrodes of electrochemical sensors modified by carbon nanomaterials
Vančík, Silvester ; Majzlíková, Petra (referee) ; Prášek, Jan (advisor)
This bachelor thesis deals with electrochemical detection of substances using screen-printed electrochemical sensors. The theoretical part describes thick film technology, sensors, selected parts of electrochemistry, voltammetry and carbon nanomaterials. The practical part includes the modification of standard screen-printed electrode by oxygen plasma and spray-coated carbon nanomaterials and its experimental comparison using cyclic voltammetry and scanning electron microscopy. The measured values were processed and evaluated numerically and graphically. In comparison with standard working electrode, the current responses of both electrodes were improved significantly.
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