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National Repository of Grey Literature

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Polishing a polymer interlayers for diamond-diamond wafer bonding Babchenko, Oleg ; Verveniotis, Elisseos ; Ledinský, Martin ; Rezek, Bohuslav ; Vallin, Ö. ; Kromka, Alexander Surfaces of as-grown samples had high local peaks (detected by white light interferometer) that impede diamond to diamond bonding as directly as by employing interlayer polymer. Detailed record

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