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National Repository of Grey Literature 1 records found  Search took 0.00 seconds. 
Fabrication of graphene mid-infrared biosensor
 Gallina, Pavel ; Hrabovsk, Milo (referee) ; Sadlek, Jakub (advisor)
The main subject of this bachelor's thesis was fabrication and measurement of response of graphene plasmonic biosensor prepared on flat and curved surfaces. Graphene produced by chemical vapour deposition (CVD) method was used for preparation of these sensors. The structures were fabricated using electron beam (EBL) and optical lithography, reactive ion etching (RIE) and magnetron sputtering. The resultant sensors were then observed in electron (SEM) and optical microscope, the topography was surveyed in atomic force microscope (AFM) and the measurement was carried out by Fourier transform infrared spectoscopy (FTIR).
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