|
|
Microstructural characterization of metallic materials using advanced SEM techniques
Piňos, Jakub ; Konvalina, Ivo ; Kasl, J. ; Jandová, D. ; Mikmeková, Šárka
The development of advanced materials is inseparably connected with detailed knowledge of the relationship between microstructure and mechanical properties. Traditional high-voltage scanning electron microscopy (SEM) is one of the most commonly used techniques for microstructure analysis, though it may be insufficient particularly for the characterization of advanced materials exhibiting a complex microstructure. The benefits of using slow electrons have been described in several articles. Experiments have been performed with a XHR SEM Magellan 400L (FEI Company) equipped with two detectors for secondary electrons (SE), an Everhart Thornley detector and an in-lens TLD detector, and solid-state BSE detector (CBS) located below the pole piece. This microscope can also be operated in the beam deceleration (BD) mode. The field of the BD not only decelerates the primary electrons, but also accelerates the emitted (signal) electrons towards the detector. Furthermore, high-angle backscattered electrons (BSE) are also collimated towards the optical axis and are detected. These electrons carry, first and foremost, crystal orientation contrast. SE and low-angle BSE can be detected by the TLD detector located inside the objective lens. Angle-resolved detection of BSE is performed using a CBS detector divided into four concentric segments.
|
host ::
RSS.