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National Repository of Grey Literature

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Characterization Of Aln Thin Films Deposited On Thermally Processed Silicon Substrates Using Pe-Ald Dallaev, Rashid The aim of this work is to study topography and chemical composition of AlN thin films deposited on Si substrates previously exposed to various time of thermal processing using plasma-enhanced atomic layer deposition technique. The samples were heated up to 500 °C for the period of 2 and 4 hours. Chemical composition of wafers and the films obtained are provided by Xray photoelectron spectroscopy (XPS). Surface topography was investigated using atomic force microscopy (AFM). Detailed record

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