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Characterization of graphene electrical properties on MEMS structures
Brodský, Jan ; Pekárek, Jan (referee) ; Gablech, Imrich (advisor)
This work presents basic properties of graphene, methods for its synthesis and methods for its characterization by Raman spectroscopy, two-point probe, four-point probe and van der Pauw measurements. The experimental part of this work describes the process of graphene oxide, reduced graphene oxide and graphene sample preparation and measurement of its current-voltage characteristic by two-point probe method. Subsequently, sample annealing in vacuum furnace is described in this work. The annealing is important for acquiring good electrical contact between the 2D material and electrodes. Sample analysis by Raman spectroscopy is performed. The last chapters of this work describe design and fabrication of MEMS structure. Such structure serves for characterization of graphene and other 2D materials.

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