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Detekční strategie pro sběr sekundárních elektronů v REM
Konvalina, Ivo ; Hovorka, Miloš ; Wandrol, Petr ; Mika, Filip ; Müllerová, Ilona
In the scanning electron microscope (SEM), the secondary electrons (SE) are usually detected by the Everhart-Thornley (ET) type detector, using a weak electrostatic field to attract low energy SE let us call it the standard system. This principle is employed for more than forty years. Modern SEMs achieve their improved image resolution by allowing the strong magnetic field of the objective lens (OL) to penetrate to the specimen surface (so called immersion system). Two SE detectors are usually used in this case: one is below the OL just as the standard ET detector (lower detector) and the other is positioned above the OL (upper detector). The final contrast of SE images for the same specimen varies with the energy and angular sensitivity of the detectors, connected with specific distributions of the electrostatic and magnetic fields in the specimen region.

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