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National Repository of Grey Literature

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Studium mechanických vlastností NCD vrstev Buršíková, V. ; Buršík, Jiří ; Karásková, M. ; Jašek, O. ; Zajíčková, L. ; Franta, D. ; Klapetek, P. ; Bláhová, O. The aim of the paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. Detailed record

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