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National Repository of Grey Literature

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Pozorování vícevrstvých polovodičových struktur v rastrovacím elektronovém mikroskopu Wandrol, Petr ; Matějková, Jiřina ; Autrata, Rudolf This work deals with problems related to the observation of semiconductor specimens in the scanning electron microscope. It was found that the best method for the localization of defects in the semiconductor structure cross sections is the imaging of their material contrast by the scintillation detector of backscattered electrons. This detector also can effectively suppress the influence of specimen charging on the image. Detailed record

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