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National Repository of Grey Literature

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Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscopy Wandrol, Petr This paper deals with the problems of backscattered electrons (BSE) detection in low voltage scanning electron microscopy (LV SEM). The BSE energy is 3 keV and less in LV SEM. This low BSE energy causes problems with the acquisition of sufficient signal for the image. It is necessary to accelerate BSE and separate SE to obtain applicable specimen image. Detailed record

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