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National Repository of Grey Literature

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Perspectives in diamond thin film technology Kromka, Alexander Synthetic diamond thin films are routinely grown over world not only for basic research but also for industrial uses. At the Institute of Physics (IoP), diamond thin films are grown since 2002. The first installed deposition system is base on microwave plasma enhanced chemical vapor deposition (CVD) in hydrogen reach gas mixture (<2% methane diluted in hydrogen). This system is well suitable for fast growth of high quality diamond films up to 5 cm in diameter. The main advance of the system is cavity like resonator which allows running stable CVD process for several days at relatively high pressures (>200 mbar). Detailed record

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