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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Low power MEMS heating membrane
 Svatoš, Vojtěch ; Pekárek, Jan (referee) ; Hubálek, Jaromír (advisor)
The aim of this thesis is to create the MEMS heating membrane with low power consumption. This work includes the main of design and fabrication processes of these heating elements. It was decided that the final sample will be created as suspended membrane type of the structure. It the end of the thesis there is detailed overview of the whole fabrication processes used for fabrication of final samples and the experiment to prove the resistance due to thermal stress.
Detailed record
Low power MEMS heating membrane
 Svatoš, Vojtěch ; Pekárek, Jan (referee) ; Hubálek, Jaromír (advisor)
The aim of this thesis is to create the MEMS heating membrane with low power consumption. This work includes the main of design and fabrication processes of these heating elements. It was decided that the final sample will be created as suspended membrane type of the structure. It the end of the thesis there is detailed overview of the whole fabrication processes used for fabrication of final samples and the experiment to prove the resistance due to thermal stress.
Detailed record

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