National Repository of Grey Literature 4 records found  Search took 0.01 seconds. 
Image contrasts in the scanning electron microscopy
Konvalina, Ivo ; Hovorka, Miloš ; Mikmeková, Šárka ; Müllerová, Ilona
When interpreting the image contrasts we have to consider all instrument parameters that influence the transport of signal electrons to the detector. Several examples are presented.
Imaging of dopants under presence of surface ad-layers
Mika, Filip ; Hovorka, Miloš ; Frank, Luděk
Scanning electron microscopy is widely used for imaging of semiconductor structures. Image contrast between differently doped areas is observable in the secondary electron emission. Quantitative relation exists between the image contrast and the dopant concentration. However, further examination has shown the dopant contrast level of low reproducibility and dependent on additional factors like the primary electron dose, varying energy and angular distributions of the SE emission and also presence of ad-layers on the semiconductor surface.
Metody přímého zobrazování hustoty stavů pomocí elektronů
Pokorná, Zuzana ; Frank, Luděk
Applicability of the SLEEM method for direct mapping of LDOS is the topic of the present study. The main issues include managing of the non-negligible angular aperture of the incident beam and even of the rocking connected with beam scanning over the field of view. These conditions require the contrast forming model to be reconsidered.
Detekce signálu segmentovým ionizačním detektorem
Černoch, P. ; Jirák, Josef
This article deals with signal detection by a segmental ionization detector. Changes of image contrasts in a dependency on different potentials on electrodes of the segmental ionization detector are studied. Electron trajectories in an electrostatic field in a vacuum simulated via program Simion 3D 7.0 are considered during the experiment.

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