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National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Upgrade of the device for depositions by ion beam sputtering
 Páleníček, Michal ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
This thesis deals with concept and realization of device which allows loading without air intake. Vacuum technology and its theoretical bases are discussed as well. Moreover the thesis is based on description of the current deposition chamber and its principles. The main part deals with the description of the concepts of lock and load systems. The first concept that has not been realized is described just briefly. The second one is thorough with description of the individual solutions and methods. The work also contains simple instructions how to install the specimen. At the end are described some outputs of simulations that have been done to comprehend and solve any problems that might occur as specimen holder cooling and deflection of magnetic rod.
Detailed record
Upgrade of the device for depositions by ion beam sputtering
 Páleníček, Michal ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
This thesis deals with concept and realization of device which allows loading without air intake. Vacuum technology and its theoretical bases are discussed as well. Moreover the thesis is based on description of the current deposition chamber and its principles. The main part deals with the description of the concepts of lock and load systems. The first concept that has not been realized is described just briefly. The second one is thorough with description of the individual solutions and methods. The work also contains simple instructions how to install the specimen. At the end are described some outputs of simulations that have been done to comprehend and solve any problems that might occur as specimen holder cooling and deflection of magnetic rod.
Detailed record

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