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National Repository of Grey Literature

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SMV-2016-20: Simulation of detection systems of scanning electron microscopes Radlička, Tomáš ; Oral, Martin ; Rozbořil, Jakub The analysis of the detection system of scanning electron microscopes produced by FEI Czech Republic was done for many setting of the electron optical system. The main goal was to analyze the detection mechanisms and to find optimal system setting for detection of the given part of signal electron spectrum. It is used for maximization of the material or topographical contrast. Detailed record

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