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Nastavení vlhkosti v ESEM
Autrata, Rudolf ; Jirák, Josef ; Špinka, Jiří
Possibilities of humidity adjustment and measurement in the specimen chamber of the environmental scanning electron microscope (ESEM) at low pressure are described in this work. Optimal pumpdown sequence and filling-in of water vapors to the specimen chamber problems are solved simultaneously. Suggested cycle serves for obtaining of suitable environment in the vicinity of the examined specimen and can be exploited for observation of battery mass structures in the process of their utilization.
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